Automatic Wet Bench System
Price: Not Announced
In stock: 0
SKU: 216541984
formulář
Description
Chemical boxes intended for the production of semiconductor wafers up to 300 mm in diameter. Fully automatic transfer of wafers in the technological process. Automatic filling of etching basths. Resistivity easurements in rinsing baths. Special baths for multiple processes in one tank.
Features and Benefits
- Fully robotic handling
- Multiple baths within one system
- User-friendly HMI interface
Configuration
- Touchscreen LCD display
- PLC controller
- PFA high purity pneumatic operated valve
- No metal contamination
- Standard 4-bath system
Optionals
- Computer network support
- SECSII/GEM support
- Various number of baths
- Special baths for multiple processes
- Measurements of resistivity
Additional Information
| Weight | 500kg |
|---|---|
| Length | 200cm |
| Width | 200cm |
| Height | 120cm |